[1]郭强,李振国..一种矩形微米流道的加工与流量测定[J].郑州大学学报(工学版),2006,27(04):116-120.[doi:10.3969/j.issn.1671-6833.2006.04.028]
GUO Qiang,Li Zhenguo.Processing and flow measurement of rectangular micron flow channel [J].Journal of Zhengzhou University (Engineering Science),2006,27(04):116-120.[doi:10.3969/j.issn.1671-6833.2006.04.028]
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一种矩形微米流道的加工与流量测定(
)
《郑州大学学报(工学版)》[ISSN:1671-6833/CN:41-1339/T]
- 卷:
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27卷
- 期数:
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2006年04期
- 页码:
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116-120
- 栏目:
-
- 出版日期:
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1900-01-01
文章信息/Info
- Title:
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Processing and flow measurement of rectangular micron flow channel
- 作者:
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郭强; 李振国.
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上海大学上海市应用数学和力学研究所,上海,200072;中国科学院力学研究所,北京,100080, 中国科学技术大学力学和机械工程系,安徽,合肥,230027
- Author(s):
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GUO Qiang; Li Zhenguo
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- 关键词:
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矩形微槽道; 进液口; 出液口; PDMS; 流量
- Keywords:
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- DOI:
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10.3969/j.issn.1671-6833.2006.04.028
- 文献标志码:
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A
- 摘要:
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介绍了一种比较成熟的矩形微米流道(微槽道)加工工艺,利用厚胶光刻工艺在硅片上制备胶模板,进而在该模板上用高分子聚合物PDMS(Polydimethylsiloxane,聚二甲基硅氧烷)制作了微米量级的微槽道(高、宽范围20～100μm),对制备的微槽道的几何精确度进行了20×100倍放大显微观测,对其流量特性进行了实验测定.实验结果与泊肃叶理论公式(NS方程的管流表达式)相对比,可以看到在微米量级的矩形微流道中,泊肃叶公式仍然适用.
- Abstract:
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A relatively mature rectangular micron flow channel (micro-channel) processing technology was introduced, and the rubber template was prepared on the silicon wafer by thick glue lithography process, and then the micron-level microchannel (height and width range 20~100μm) was made with polymer PDMS (polydimethylsiloxane, polydimethylsiloxane) on the template, and the geometric accuracy of the prepared microchannel was magnified by 20×100 times, and the flow characteristics were experimentally determined. Compared with the Poisu leaf theory formula (the pipe flow expression of the NS equation), it can be seen that the Poisu leaf formula is still applicable in rectangular microfluidic channels with the order of microns.
更新日期/Last Update:
1900-01-01