[1]王栋,马小峰,李大磊,等.基于引擎机制的PECVD工作过程的虚拟仿真[J].郑州大学学报(工学版),2008,29(03):54-58.[doi:10.3969/j.issn.1671-6833.2008.03.014]
　WANG Dong,MA Xiaofeng,LI Dalei,et al.Virtual simulation of PECVD working process based on engine mechanism[J].Journal of Zhengzhou University (Engineering Science),2008,29(03):54-58.[doi:10.3969/j.issn.1671-6833.2008.03.014]
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基于引擎机制的PECVD工作过程的虚拟仿真()
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《郑州大学学报(工学版)》[ISSN:1671-6833/CN:41-1339/T]

卷:
29卷
期数:
2008年03期
页码:
54-58
栏目:
出版日期:
1900-01-01

文章信息/Info

Title:
Virtual simulation of PECVD working process based on engine mechanism
作者:
王栋; 马小峰; 李大磊; 等.
郑州大学,机械工程学院,河南,郑州,450001, 郑州大学,机械工程学院,河南,郑州,450001, 郑州大学,机械工程学院,河南,郑州,450001, 郑州大学,机械工程学院,河南,郑州,450001
Author(s):
WANG Dong; MA Xiaofeng; LI Dalei; etc
关键词:
虚拟现实;  等离子体增强化学汽相沉积;  过程仿真;  引擎机制
Keywords:
DOI:
10.3969/j.issn.1671-6833.2008.03.014
文献标志码:
A
摘要:
讨论了卧式PECVD的工作原理,对虚拟加工过程中仿真实现的关键技术进行了研究.基于Open Inventor开发平台强大的引擎机制,用程序实现了连续式等离子体增强化学汽相沉积(PECVD)系统(In-line PECVD System)的虚拟加工工作过程的仿真,从而保证物理样机的设计成功率、减少物理样机的设计与试制时间.
Abstract:
The working principle of horizontal PECVD was discussed, and the key technologies of simulation in the virtual machining process were studied. Based on the powerful engine mechanism of the Open Inventor development platform, the simulation of the virtual processing process of the continuous plasma-enhanced chemical vapor deposition (PECVD) system (In-line PECVD) system is realized by the program, so as to ensure the design success rate of the physical prototype and reduce the design and trial production time of the physical prototype.

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更新日期/Last Update: 1900-01-01